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A SYSTEMATIC STUDY on the DIELECTRIC RELAXATION, ELECTRIC MODULUS and ELECTRICAL CONDUCTIVITY of Al/Cu:TiO<inf>2</inf>n -Si (MOS) STRUCTURES/CAPACITORS

Surface Review and Letters · Ekim 2020

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YÖKSİS Kayıtları
A Systematics Study on the Dielectric Relaxation, Electric Modulus and Electrical Conductivity of Al/Cu:TiO2/n-Si (MOS) Structures/Capacitors
Surface Review and Letters · 2020 SCI-Expanded
PROFESÖR MURAT YILDIRIM →

Makale Bilgileri

DergiSurface Review and Letters
Yayın TarihiEkim 2020
Cilt / Sayfa27
Özet The various levels (5%, 10% and 15%) of Cu-doped TiO2 thin films were grown on the n-type silicon (Si) wafer by spin coating technique to obtain Al/(Cu:TiO2)/n-Si (MOS) capacitors. Both the real and imaginary components of complex dielectric (ϵ=ϵ′-jϵ′′), complex electric modulus (M-=M′+jM′′), loss tangent (tan δ) and alternating electrical conductivity (σac) of the obtained Al/(Cu:TiO2)n-Si (MOS) capacitors were studied by taking into account the effects of Cu-doping levels into TiO2 viaimpedance spectroscopy method (ISM) in the wide range voltage (±5V) and frequency (10kHz-1MHz). All the obtained dielectric parameters were obtained as strongly dependent on frequency, voltage and Cu doping level. The observed anomalous peak in the forward bias region both in the real and imaginary components of ϵ-, tan δ, complex electric modulus (M-) and σac were attributed to the Cu:TiO2 interlay er, series resistance (Rs), surface states (Nss), interfacial/surface and dipole polarizations. The higher values of ϵ′ at low and intermediate frequencies implied that Nss have enough time to follow external ac signal, and also dipoles respond to the applied field to reorient themselves. Consequently, the fabricated Al/(Cu:TiO2)n-Si can be successfully used as MOS capacitor or MOS-field-effect transistor (MOSFET) in the industrial applications in near future.

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Anahtar Kelimeler

Al/(Cu:TiO )n -Si (MOS) capacitor 2 dielectric relaxation phenomena electric modulus and conductivity mechanisms impedance spectroscopy method (ISM)

Kurumlar

Iğdır Üniversitesi
Igdir Turkey
Selçuk Üniversitesi
Selçuklu Turkey

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